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In-Situ Particle Monitor Devices or Endpoint Devices)
1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol
information about substrates is managed by the factory system
This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects
without dependence on operator or host input
M01200 - SEMI M12 - ウェーハ表面の連続英数字マーキングの仕様 StdPbc-0320 In-Situ Particle Monitor Devices orglobal Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20067CD ROM1988200311 OCR SOI Referenced SEMI Standards SEMI M13 Specification for Alphanumeric Marking of Silicon Wafers
US$ 2340.00
US$ 1125.00
US$ 765.00