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This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16
SEMI E35-0200 (technical revision)
SEMI E40-0307 (technical revision)
E05420 - SEMI E54.20 - Specification for Sensor/Actuator Network Communications for EtherCAT® Revision:SEMI E54.20-0316 - Superseded and in front of or1 Purpose 1. 1 This Specification is part of the SEMI Sensor Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the EtherCAT standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor Actuator Network Standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off the shelf interoperability of
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