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This Standard defines the common mask data format specifications based on OASIS for mask tools
1-1114 (complete rewrite)
SEMI M13-0998 (technical revision)
EtherCATは自動制御系と分散配置されるI/Oとの間に機器（デバイス）レベルの，高速かつ低コストの接続が可能なよう最適化されたものである。
In addition new methods modifying the original Siemens process were investigated and were introduced in high volume manufacturing
E09100 - SEMI E91 - プローバ独自の装置モデル（PSEM）に関する仕様 StdPbc-0123 This Standard defines the commonglobal Information & Control Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM1999920006 PSEMPSEMSEMI E30GEM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of SEMI Equipment (GEM) SEMI M20 Specification for Establishing a Wafer Coordinate System SEMI M21 Specification for Assigning Addresses to Rectangular