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E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) StdTpc-Gas Particle Specifications 3 This Standard includes instructions

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3 This Standard includes instructions to prepare extractants for analysis by exposing raw materials

July 8-November 29

· オプションA: 能動搬送(能動OHSなど)で内部ストッカーのロードポートに水平にFOUPを移載する。図1にオプションAを示す。

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E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) StdTpc-Gas Particle Specifications 3 This Standard includes instructionsNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing

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