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The purpose of this Document is to provide a series of specifications for different grades of hydrogen (H2) that are used in the semiconductor industry
1-1104 (technical revision)
It was formally approved by ASTM balloting procedures and adhered to ASTM patent requirements
SEMI MF1188-1105 (technical revision)
SEMI D62-0619 (Reapproved 1224)
M03400 - SEMI M34 - SIMOXウェーハを規定するための指針 Revision:SEMI M34-0299 - Superseded The purpose of this Document0. 5 mSIMOXSIMOX SOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M22 Specification for Dielectrically Isolated (DI) Wafers
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