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D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port Revision:SEMI D16-0998 - Inactive an outlook for the semiconductor

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Description

an outlook for the semiconductor equipment market

The SEMI World Fab Forecast provides high level summaries

2  The details of any underlying concepts and behavioral models (e

Process technology used in the manufacture of semiconductors and electronic devices continues to achieve increases in active feature density and device complexity

This Standard focuses on defining PCS capabilities

D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port Revision:SEMI D16-0998 - Inactive an outlook for the semiconductorThis Specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost effective interfacing while preserving freedom of choice in material handling equipment. Referenced SEMI Standards SEMI D5 Standard Size for

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