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D01700 - SEMI D17 - FPDガラス基板搬送用カセットの機械的仕様 StdPbc-0220 単位 - SI単位系を使用する。

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Description

単位 - SI単位系を使用する。

This document defines and describes the major topics normally included in procurement and acceptance of minienvironments

1が出版されたため改訂年月が更新された。

SEMI C90-00-0725 (complete rewrite)

2 Hydrogen (H2) Delivered as Pipeline Gas

D01700 - SEMI D17 - FPDガラス基板搬送用カセットの機械的仕様 StdPbc-0220 単位 - SI単位系を使用する。Global Flat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19991215North American Regional Standards Committee20001SEMI On Line2000219989 FPD SEMI D18 Referenced SEMI Standards SEMI D18 Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates SEMI E15 Specification for Tool Load Port

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