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or SEMI M38 are specified by customers of silicon wafer suppliers and are usually part of Certificates of Compliance
this Guide can be applied to all materials that show low stiffness in certain deformation modes
but may find increased importance in the future
10-0698 (first published)
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing
G00800 - SEMI G8 - Test Method for Gold Plating StdVol-Equipment Automation Hardware or SEMI M38 are specifiedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Test Method describes procedures to determine gold plating quality. These methods apply to gold plating on cofired ceramic or metal packages. The grade, hardness, and thickness of the gold plating shall be specified