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All liquid chemical standards consist of guidelines
This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by defining the items/parameters needed to procure virgin silicon carrier wafers to be used in a 3DS-IC process
Versatility
org in July 2006
SEMI C18-0714 (Reapproved 0620)
C00328 - SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality Revision:SEMI C3.28-0200 (Withdrawn 0303) - Replaced All liquid chemical standards consistThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17, 1999. Available at www. semi. org in February 2000; originally published in 1985; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas