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SEMI E109-0302 (technical revision)
SEMI E169-0414 (first published)
1 The purpose of this Standard is to standardize requirements for 45% potassium hydroxide solution used in the semiconductor industry and testing procedures to support those standards
SEMI E87-1105 (technical revision)
This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1
E17300 - SEMI E173 - Specification for XML SECS-II Message Notation (SMN) Revision:SEMI E173-0721 - Current SEMI E109-0302 (technical revision)The content of SECS II messages are defined in SEMI E5, SEMI Equipment Communication Standards 2 Message Content (SECS II). SECS II messages can be transmitted to and from and equipment using either the protocol defined in SEMI E4, Equipment Communication Standards1 Messages Transfer (SECS I) or the protocol defined in SEMI E37, High Speed Message Transfer (HSMS) Generic Services. The purpose of this Specification is to define a standardized notation