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regulators and filters which convey and control the liquid chemicals in the piping system
SEMI E30 — Specification for the Generic Model for Communications and Control of SEMI Equipment (GEM)
It may be used as a basis for establishing performance criteria for purchases of new high purity water (HPW) equipment
The intent of this Standard is not to suggest any specific testing program
orgで。初版は1988年に発行された。
P02300 - SEMI P23 - Guidelines for Programmed Defect Masks and Benchmark Procedures for Sensitivity Analysis of Mask Defect Inspection Systems StdPbc-1224 regulators and filters which conveyThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www. semi. org in October 2007. Originally published in 1993; previously published in February 2000. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive