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This Specification defines wafer transport planes within cassette and process modules
3 This Specification does not require that the metadata provided by the equipment be directly human readable
本スタンダードは，global Liquid Chemicals Committeeで技術的に承認されている。現版は2010年8月27日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年10月にwww
SEMI E5-85 (technical revision)
Altogether
E12500 - SEMI E125 - 装置自己記述（EqSD）の仕様 Revision:SEMI E125-0709 - Superseded This Specification defines wafer transportSubordinate Standards (included) SEMI E125. 1 0710 EqSDSOAP Referenced SEMI Standards (purchase separately) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 Object Services Standard: Concept, Behavior, and Services SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E120. 1 XML Schema for the Common Equipment Model SEMI E121 Guide for Style & Usage of XML for Semiconductor Manufacturing