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この文書の目的は：(1) 20/0
SEMI E130-0618 (designation update)
as well as complex control devices such as robots
at which time they may be classified as defects or non-defects
and adds Prober Job state model to GEM Standard requirements and capabilities
E05414 - SEMI E54.14 - Specification for Sensor/Actuator Network Communications for PROFINET StdPbc-0324 この文書の目的は：(1) 20/0This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19, 2008. It was available at www. semi. org in February 2009. Originally published March 2005. NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately. This specification is part of the SEMI Sensor
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