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Referenced SEMI Standards (purchase separately)SEMI 3D7 — Guide for Alignment Mark for 3DS-IC Process
1 This Guide provides the tools to describe wafer stacks in a 3DS-IC process
In microelectronics
SEMI 3D5-0314 (Reapproved 1218)
Operating Situations — Moisture contribution from a gas delivery component may be the result of improper design and construction
C00351 - SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality StdPbc-0615 Referenced SEMI Standards (purchase separately)SEMIThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in March 2012; originally published in 1995; previously published November 2011. NOTICE: This Document was balloted and approved for withdrawal in 2012; it has been replaced by SEMI C71. To define the
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